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Raider ECD
The RAIDER electroplating systems for 150mm - 300mm single wafer, automated, multi-chamber, electrochemical deposition system delivering the highest throughput in the smallest footprint available
Raider SP
Fourth generation single wafer, precision, high volume surface preparation system, incorporating spray, vapor, immersion, megasonics and anneal technologies with automated single or dual-side wafer processing.
Spin Rinser Dryer (SRD)
The SRD is a 25-wafer, batch size, single or dual chamber tool. This proven design has demonstrated uptime of >95%. Introduced in 1979, over 25,000 Spin Rinser/Dryer units have shipped worldwide.
ACMS
Advanced Chemical Management System automatically monitors and replenishes the constituents of electrolyte plating baths of up to four Semitool ECD tools.
Raider M
The RAIDER M (Mini) is a fully automated, 2 chamber, high-performance single-wafer ECD system. Ideal for product development and pilot production.
Equinox 1st Generation Single Wafer Tool
SEMITOOL builds Equinox platforms in 4 and 6 chamber versions and are available both new, direct from SEMITOOL, and remanufactured by Rhetech.
AcceleRAIDER
A Raider tool with enhanced automation to run volumes in excess of 400 wafers per hour
Sirius
Sirius is a batch 50-Wafer, single chamber, ozone and water chemical-free resist stripper with high-performance stipping, rinsing and drying.
Scepter Rinser Dryer
Batch 50-wafer, single chamber, high-performance rinsing and drying. First introduced in 1979, there are over 28,000 Spin Rinser/Dryer units shipped worldwide.
| Scepter Solvent
Batch, semi-automated 50-wafer, single or double chamber stripping, developing, and cleaning spray solvent tool.
Spectrum
Automated batch wafer chemical system for high volume manufacturing
Spray Solvent Tool (SST)
Batch, semi-automated 25-wafer, single or double chamber chemical stripping, developing, and cleaning spray solvent tool. Over 1,200 SST chambers have been installed worldwide in Asia, Europe and the United States.
Spray Acid Tool (SAT)
Batch, semi-automated 25-wafer, single or double chamber chemical cleaning, stripping, etching, and spray acid tool.
Storm
Storm II, Storm III, Storm 300 for batch cleaning system for dry to dry cassette cleaners for carriers, 300mm FOUPs, FOSBs, and Shippers.
Raider M-Quattro
The Raider M-Quattro is a high-performance single-wafer system for electroplating or cleaning. Developed for low volume fabs, this four-chamber system is the smallest most cost effective precision tool
Raider M-ECD/SP
The Raider M-ECD/SP is an automated, high-performance single-wafer ECD or Surface Preparation system.
Scepter Acid Tool
The semi-automated Scepter Acid Tool is a cost-effective solution for a wide array of surface preparation processes.
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