| Wednesday - June 25, 2008 | |
| 7:00 AM | Breakfast |
| 7:55 AM | Introduction |
| 8:00 AM | Keynote - Conference Room |
| Electrochemical Processing in the Semiconductor Industry Rajesh Krishnamurthy - ChipWorks |
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COPPER INTERCONNECTS - Session Chair: Klaus Pfeifer |
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| 8:45 AM | Cu-Based ULSI Interconnect Technologies Invited: Dan Edelstein - IBM |
| 9:30 AM | Effects of Mass Transport and Macromolecular Additives on Copper Electrodeposit Microroughness Michael L. Free, Ravindra Bhide, and Apichart Rodchanarowan - University of Utah, Dept. of Metallurgical Engineering |
| 9:55 AM | Break |
| 10:25 AM | Influence of Plating Chemistry and Current Waveform on the Film Properties of Cu Interconnects Qi Wang, Patrick Cheung, Wesley Cabreros, Kashmir Sahota - Spansion Inc. |
| 10:50 AM | Interaction of Barrier Seed Surface Contamination with Electro-Deposition Copper Films Frank Smith, Sai Boyapati, Bill Brennan, Kinsang Lam, Pete Beckage, Brad Carpenter, and Brandon Brooks – Spansion, Semitool |
| 11:30 AM | Lunch |
PROPERTIES OF ELECTROCHEMICALLY PROCESSED FILMS - Session Chair: Kevin Mikelson |
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| 1:30 PM | A Novel Method For Isolating Electrodeposited Films Nikit Phadke and Michael L. Free - University of Utah, Department of Metallurgical Engineering |
| 1:55 PM | Some Peculiarities Of Nature Of Reverse Bias Electrical Conductivity Of Niobium Pentoxide Anodic Oxide Films In Capacitor Structure On Niobium Leonid SKATKOV, Valeriy GOMOZOV, Irina STEPANOVA, Svetlana DERIBO – PCB(Israel) and National Technical Universitet, Ukraine |
| 2:20 PM | Development of Low Stress Binary and Tertiary High-Magnetic Flux Alloy films from Electrolytic Solutions W. Graham Yelton, and Adam Rowen - Sandia National Labs |
| 2:45 PM | Break |
| 3:15 PM | 3D Interconnect Plating and Stacking Charles Wu - Micron |
| 3:40 PM | Electroless Nickel/Palladium/Gold As Universal Surface Finish For Soldering/ Bonding Application In Semiconductor Industry Dr. Albrecht Uhlig, Dr. Lilly Tsai, J. Gaida, A. Taniguchi – Atotech |
| 5:00 PM | Dinner in Bigfork, MT |